4232021ČЇMEMS܂a(chn)I(y)l(f)չI(y)ՓڰӲ[@_ʡLtԺʿdίӛSP(gun)I(lng)(do)ͼeϯίӛLN_Ļʽ
SʾԹһԴ^̎Їϱֽ羀ǻĻAİl(f)ЃɂŰl(f)zַйſ̮̖750@ֵԴ^ɂzַО̽ԴԹžDz֮Сǡu(y)ҲǰʡһO(sh)гУ1949˰ȫCϽͨм~ͬF(xin)м~в^(q)26ϹI(y)ȫаl(f)֮һȫʏʾ(chung) ^(q)ijҲǰQ(mo)ʏƬ^(q)֮һ҂(sh)ʩI(y)(qing)к̈́(chung)(q)ӑ(zhn)ӏ(qing)ǰ̽ǰ˲֣eǾooЇ214늿4041ɹ(chung)MEMSҵط(lin)Ϲ̌(sh)(yn)ҵһش(zhn)ƽ_γ܂ԭO(sh)Ӌyԇb͑(yng)õa(chn)I(y)֣ɞȫʡΨһм·MEMSa(chn)ij
(dng)ǰSһ݆Hͮa(chn)I(y)׃dMOEMSV(yng)ڹI(y)(lin)W(wng)Ԅ{t(y)5GȱI(lng)l(f)չǰV韟oδԡоǡ(chung)δ}RˇҲίW(xu)g(sh)硢I(y)ҵă(yu)㌣ҺI(lng)܊۽܂·_չ߶ˌԒ̽ӑ҂Դ˴δC(j)^M(jn)rץC(j)_(chung)δȫӏ(qing)a(chn)W(xu)к(sh)ʩ256Ƅ(chung)wϵO(sh)ȫ(gu)·Įa(chn)I(y)Ⱥa(chn)I(y)B(ti)ӿЇHһ(chung)Їй
AW(xu)УLԺʿoҕlf·a(chn)I(y)֧҇(jng)(j)l(f)չͱχҰȫ(zhn)A(ch)ԡȌ(do)Ԯa(chn)I(y)l(f)չ?ji)?chung)Ҹ߶ҕ·a(chn)I(y)İl(f)չMEMSĵ܂g(sh)ǬF(xin)ƼǰҲһϢg(sh)֧֮һĿǰ҇MEMSa(chn)I(y)l(f)չ܇һ҄(chung)Ҹɵļg(sh)Һ̈́(chung)¾ӢӿF(xin)һГ(dn)(dng)I(y)҂ҲѵJ(rn)RĿǰcl(f)_(d)ҵIJ҇еͶ˂Ԅӻˮƽ^ͣ߶˂Ј߀هM(jn)ȱ(chung)µĺļg(sh)ca(chn)ƷP(gun)IO(sh)ԭϿӆ}Ȼ(yn)SϢg(sh)˹ܡ(lin)W(wng)b5GͨӍI(lng)l(f)չҪ҂оδ_^ЇMEMSa(chn)I(y)һʢ£\ʮ塱MEMSl(f)չһҪӑǹͬa(chn)I(y)l(f)չڅݡͬоa(chn)I(y)l(f)չC(j);һδ
ڰʡĸ߶ҕʹ֧214MEMSоI(lng)ȡشɿѽ(jng)ɞ(ni)MEMSҪI(y)δ@MEMS@һ}ҕͬM(jn)҇Ϣa(chn)I(y)δl(f)չQ(mo)נ˲ĺvʷrδ_h(yun)x
tıʾC(j)ϵy(tng)MEMSӼg(sh)A(ch)ϰl(f)չĶW(xu)ƽǰоI(lng)Ҳδl(f)չҪ(jng)^ʮİl(f)չѳɞ粚ĿشƼI(lng)֮һS5G(lin)W(wng)rMEMS܂ȡy(tng)a(chn)ƷV(yng)ڸܽK܇t(y)ȱdI(lng)һϢg(sh)˹bI(lng)ĻA(ch)֧@ѽ(jng)ɞP(gun)Һĸͮa(chn)I(y)朡(yng)朰ȫҪI(lng)ʡooץס·a(chn)I(y)l(f)չđ(zhn)ԙC(j)ԳЈ(do)c(do)ɫl(f)չcc(din)ͻc(din)M(jn)cB(yng)Y(ji)ϣѴǸI(y)(gu)аɫļ·a(chn)I(y)ȺO(sh)Ӌ졢byԇbȫa(chn)I(y)朼˳^300I(y)γһĮa(chn)I(y)l(f)չ(yu)ec@ʾӲܼԴ܇Ȯa(chn)I(y)ںϰl(f)չ_Sđ(yng)È͏V韵ЈgҪĹI(y)ʏ(chung)ԇ(yn)^(q)ĺijУȥ֫@ЇQ(mo)(sh)(yn)^(q)Ƭ^(q)õͶYh(hun)ͮa(chn)I(y)A(ch)Ҳȫ֮һȫʡΨһͬrм·MEMSMEMSеa(chn)I(y)@дI(y)˲ЙC(j)(gu)һ܂I(y)Џ2017_ʼBm(x)ekЇMEMSl(f)չ҂һϢYԴ۵ƽ_M(jn)һM(jn)MEMS܂a(chn)I(y)ĸ|(zh)l(f)չ
OСM(jn) ЈLj ؔ(jng)W(wng)ӛ |